SIGMA XI - NJIT CHAPTER  

and


JOINT NJIT-RUTGERS (NEWARK) APPLIED PHYSICS PROGRAM

present a seminar on

Friday, March 5, 1999 at 1:30 p.m. (Refreshments at 1:15 p.m.)
ECE Center, Second Floor, Room 202
New Jersey Institute of Technology

MICROSYSTEMS BASED ON CVD DIAMOND FILMS

Prof. Erhard Kohn, PhD

Dept. of Electron Devices and Circuits

University of Ulm, Germany

ABSTRACT

The talk will address three areas: (1) Materials requirements, (2) Status and what are the prospects of diamond microsystems and (3) is there a possibility for smart diamond MEMS. The technology will be highlighted with a number of novel applications including: (a) cantilever beams as high speed resonators, (b) a sensor for extremely high acceleration, (c) a microheater, which has been implemented in an inkjet, (d) a micro-relay for high power and microwave switching and (e) DUV detectors for wavelengths below 225 nm. One of the goals of our development is to apply these structures to medical instruments.


BIOGRAPHY

Prof. Erhard Kohn is chairman of the Electron Devices and Circuits Department at the University of Ulm in Ulm, Germany. He has established a key European laboratory with a large cleanroom for processing non-silicon materials at the University of Ulm. Previously he was the director of III-V semiconductor device R&D at Siemens Research Laboratories in Princeton, NJ. He is now involved in both HEMT-class device research and MEMS at Ulm.



For information, contact Dr. Ken Chin: at (973)596-3297 or at   chin@megahertz.njit.edu

Information and directions to NJIT are also available on the Web at                                                                                                               http://www.njit.edu/University/Directions.html