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Responding to your need...
   
Ifyour business needs a cleanroom facility fully equipped for microfabrication and micromachining of silicon and glass wafers to fabricate your prototypes or develop a small-scalemanufacturing process, please consider using ours. The Microelectronics Fabrication Center provides services and technical support to industry on design, fabrication, and fast prototyping of application-specific integrated circuits, optical switches, pressure sensors, andmicro-electro-mechanical systems for biomedical, biometrics, and microfluidics applications. Highly qualified engineers assisted by technical staff and graduate students will help your business to solve design/process/fabrication problems, will train your personnel in a cleanroom environment, and will quickly and efficiently fabricate your prototypes.















DESIGN

  • Biological and Chemical Sensor Arrays
  • Biometrics Pressure-Sensor Arrays
  • MEMS, BioMEMS, ASICs, Microfluidics Devices
  • Piezoelectric and Thermal Actuators 
  • Acousto-Electro-Optical Devices
  • Optical Switches Integrated Photoelectronic Devices









MICROFABRICATION
  • Lithography using Thin and Thick Photoresists and Polymides
  • Spin-onThin Film Deposition
  • Fusion, Anodic, and Thermocompression Wafer Bonding
  • E-beam Evaporation of Metal Thin Films
  • DC Sputtering of Al and Silicides
  • RIE, DRIE, and Wet Chemical Etch
  • Anisotropic Silicon Etch
  • Oxidation (Dry and Steam)
  • LPCVD of Polysilicon, Silicon Nitride, and Silicon Dioxide
  • Low Temperature Oxidation-LTO
  • PECVD silicon nitride (including low stress), silicon dioxide, and polysilicon
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TEST
  • Ellipsometry
  • Thin Film Thickness Measurements
  • Electrical Measurements
  • Four-Point Probe for Resistivity
  • Sheet  Resistance, and p-/n-type 
  • Quasi-Static & HighFrequency C-V
  • Semiconductor Parameter Analyzer
  • Stress/Temperature Characteristics